TY - JOUR ID - 10935 TI - Effect of thermoelastic damping in nonlinear beam model of MEMS resonators by differential quadrature method JO - Journal of Applied and Computational Mechanics JA - JACM LA - en SN - AU - Ale Ali, Nassim AU - Mohammadi, Ardeshir Karami AD - Department of Marine Engineering, Khorramshahr University of Marine Science & Technology AD - Department of Mechanical Engineering, Shahrood University of Technology, Shahrood Y1 - 2015 PY - 2015 VL - 1 IS - 3 SP - 112 EP - 121 KW - thermoelastic damping KW - stretching effect KW - resonator KW - Differential quadrature method DO - 10.22055/jacm.2015.10935 N2 - This paper presents a nonlinear model of a clamped-clamped microbeam actuated by an electrostatic load with stretching and thermoelastic effects. The frequency of free vibration is calculated by discretization based on the Differential Quadrature (DQ) Method. The frequency is a complex value due to the thermoelastic effect that dissipates energy. By separating the real and imaginary parts of frequency, the quality factor of thermoelastic damping is calculated. Both the stretching and thermoelastic effects are validated by the referenced papers. This paper shows that the main nonlinearity of this model is voltage, which makes the difference between linear and nonlinear models. The variation of thermoelastic damping (TED) versus geometrical parameters, such as thickness, gap distance and length, is investigated and these results are compared by linear and nonlinear models in high voltages. This paper also shows that in high voltages the linear model has a large margin of error for calculating thermoelastic damping (TED) and thus the nonlinear model should be used. UR - https://jacm.scu.ac.ir/article_10935.html L1 - https://jacm.scu.ac.ir/article_10935_a3f9976908edf82b3b15a1177348936f.pdf ER -