Impact-enhanced Electrostatic Vibration Energy Harvester

Document Type : Research Paper


1 Department of Semiconductor Devices and Microelectronics, Novosibirsk State Technical University,‎ Karl Marx Avenue 20, Novosibirsk, 630073, Russia‎

2 Department of Computer Science in Economics, Novosibirsk State Technical University, Karl Marx Avenue 20, Novosibirsk, 630073, Russia


An influence of mechanical impacts between variable capacitor electrodes on the electrostatic vibration energy harvester (e-VEH) operation is studied theoretically. The analysis is carried out for two conditioning circuits with parallel and serial load connection. A relationship between e-VEH parameters and external mechanical force characteristics enabling to assess the possibility of operation in a periodic impact mode is obtained. Dependences of the average power generated by the impact-enhanced e-VEH versus the number of collisions between the electrodes and the load resistor value are calculated. The operation of the harvester for two circuits in impact and non-impact modes is compared and analyzed. It is shown that the average power generated by the e-VEH for the impact mode can exceed the power for the non-impact mode by 1–2 orders of magnitude along with a significant decrease of the harvester optimal load resistance.


Main Subjects

Publisher’s Note Shahid Chamran University of Ahvaz remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

[1] Heydarishahreza, N., Ebadollahi, S., Vahidnia, R., Dian, F. J., Wireless Sensor Networks Fundamentals: A Review, 2020 11th IEEE Annual Information Technology, Electronics and Mobile Communication Conference (IEMCON), Vancouver, Canada, 0001–0007, 2020.
[2] Khan, S., Pathan, A.-S., Alrajeh, N., Wireless Sensor Networks: current status and future trends, CRC Press, Boca Raton, 2016.
[3] Harb, A., Energy harvesting: State-of-the-art, Renewable Energy, 36, 2011, 2641–2654.
[4] Vullers, R. J. M., van Schaijk, R., Doms, I., Van Hoof, C., Mertens, R., Micropower energy harvesting, Solid-State Electronics, 53, 2009, 684–693.
[5] Wei, C., Jing, X., A comprehensive review on vibration energy harvesting: Modelling and realization, Renewable and Sustainable Energy Reviews, 74, 2017, 1–18.
[6] Khan, F. U., Review of non-resonant vibration based energy harvesters for wireless sensor nodes, Journal of Renewable and Sustainable Energy, 8, 2016, 044702.
[7] Mitcheson, P. D., Yeatman, E. M., Rao, G. K., Holmes, A. S., Green, T. C., Energy Harvesting From Human and Machine Motion for Wireless Electronic Devices, Proceedings of the IEEE, 96 (9), 2008, 1457–1486.
[8] Cai, M., Yang, Z., Cao, J., Liao, W.-H., Recent Advances in Human Motion Excited Energy Harvesting Systems for Wearables, Energy Technology, 8, 2020, 2000533.
[9] Yanazawa, H., Homma, K., Growing market of MEMS and technology development in process and tools specialized to MEMS, 2017 IEEE Electron Devices Technology and Manufacturing Conference (EDTM), Toyama, Japan, 143–144, 2017.
[10] Mishra, M. K., Dubey, V., Mishra, P. M., Khan, I., MEMS Technology: A Review, Journal of Engineering Research and Reports, 4 (1), 2019, 46001.
[11] Wang, G., Liao, W.-H., Yang, B., Wang, X., Xu, W., Li, X., Dynamic and Energetic Characteristics of a Bistable Piezoelectric Vibration Energy Harvester with an Elastic Magnifier, Mechanical Systems and Signal Processing, 105, 2018, 427–446.
[12] Yin, Z., Gao, S., Jin, L., Sun, Y., Wu, Q., Zhang, X., Guo, S., A Dual Impact Driven Frequency Up-Conversion Piezoelectric Energy Harvester for Ultralow-Frequency and Wide-Bandwidth Operation, Sensors and Actuators A: Physical, 331, 2021, 112961.
[13] Woo, M. S., Ahn, J. H., Eom, J. H., Hwang, W. S., Kim, J. H., Yang, C. H., Song, G. J., Hong, S. D., Jhun, J. P., Sung, T. H., Study on Increasing Output Current of Piezoelectric Energy Harvester by Fabrication of Multilayer Thick Film, Sensors and Actuators A: Physical, 269, 2018, 524–534.
[14] Khan, F. U., Iqbal, M., Electromagnetic Bridge Energy Harvester Utilizing Bridge’s Vibrations and Ambient Wind for Wireless Sensor Node Application, Journal of Sensors, 2018, 3849683.
[15] Li, Y., Zhou, C., Cao, Q., Wang, X., Qiao, D., Tao, K., Electromagnetic Vibration Energy Harvester with Tunable Resonance Frequency Based on Stress Modulation of Flexible Springs, Micromachines, 12(9), 2021, 1130.
[16] Gunn, B., Alevras, P., Flint, J. A., Fu, H., Rothberg, S. J., Theodossiades, S., A Self-Tuned Rotational Vibration Energy Harvester for Self-Powered Wireless Sensing in Powertrains, Applied Energy, 302, 2021, 117479.
[17] Khan, F. U., Qadir, M. U., State-of-the-Art in Vibration-Based Electrostatic Energy Harvesting, Journal of Micromechanics and Microengineering, 26 (10), 2016, 103001.
[18] Dragunov, V. P., Ostertak, D. I., Pelmenev, K. G., Sinitskiy, R. E., Dragunova, E. V., Electrostatic Vibrational Energy Converter with Two Variable Capacitors, Sensors and Actuators A: Physical, 318, 2021, 112501.
[19] Guo, X., Zhang, Y., Fan, K., Lee, C., Wang, F., A Comprehensive Study of Non-Linear Air Damping and “Pull-in” Effects on the Electrostatic Energy Harvesters, Energy Conversion and Management, 203, 2020, 112264.
[20] Dragunov, V. P., Ostertak, D. I., Sinitskiy, R. E., New Modifications of a Bennet Doubler Circuit-Based Electrostatic Vibrational Energy Harvester, Sensors and Actuators A: Physical, 302, 2020, 111812.
[21] Xia, K., Chi, Y., Fu, J., Zhu, Z., Zhang, H., Du, C., Xu, Z., A Triboelectric Nanogenerator Based on Cosmetic Fixing Powder for Mechanical Energy Harvesting, Microsystems & Nanoengineering, 5 (1), 2019, 26.
[22] Zhang, D., Shi, J., Si, Y., Li, T., Multi-Grating Triboelectric Nanogenerator for Harvesting Low-Frequency Ocean Wave Energy, Nano Energy, 61, 2019, 132–140.
[23] Luo, A., Zhang, Y., Guo, X., Lu, Y., Lee, C., Wang, F., Optimization of MEMS Vibration Energy Harvester with Perforated Electrode, Journal of Microelectromechanical Systems, 30 (2), 2021, 299–308.
[24] Tao, K., Yi, H., Yang, Y., Tang, L., Yang, Z., Wu, J., Chang, H., Yuan, W., Miura-Origami-Inspired Electret/Triboelectric Power Generator for Wearable Energy Harvesting with Water-Proof Capability, Microsystems & Nanoengineering, 6 (1), 2020, 56.
[25] Luo, A., Xu, Y., Zhang, Y., Zhang, M., Zhang, X., Lu, Y., Wang, F., Spray-Coated Electret Materials with Enhanced Stability in a Harsh Environment for an MEMS Energy Harvesting Device, Microsystems & Nanoengineering, 7 (1), 2021, 15.
[26] Tao, K., Chen, Z., Yi, H., Zhang, R., Shen, Q., Wu, J., Tang, L., Fan, K., Fu, Y., Miao, J., Yuan, W., Hierarchical Honeycomb-Structured Electret/Triboelectric Nanogenerator for Biomechanical and Morphing Wing Energy Harvesting, Nano-Micro Letters, 13 (1), 2021, 123.
[27] Fan, K., Wei, D., Zhang, Y., Wang, P., Tao, K., Yang, R., A Whirligig-Inspired Intermittent-Contact Triboelectric Nanogenerator for Efficient Low-Frequency Vibration Energy Harvesting, Nano Energy, 90, 2021, 106576.
[28] Tao, K., Zhao, Z., Yang, Y., Wu, J., Li, Y., Fan, K., Fu, Y., Chang, H., Yuan, W., Development of Bipolar-Charged Electret Rotatory Power Generator and Application in Self-Powered Intelligent Thrust Bearing, Nano Energy, 90, 2021, 106491.
[29] Le, C. P., Halvorsen, E., Søråsen, O., Yeatman, E. M., Microscale Electrostatic Energy Harvester Using Internal Impacts, Journal of Intelligent Material Systems and Structures, 23 (13), 2012, 1409–1421.
[30] Phu, C., Halvorsen, E., Microscale Energy Harvesters with Nonlinearities Due to Internal Impacts, Small-Scale Energy Harvesting, InTech, London, 2012.
[31] Basset, P., Galayko, D., Cottone, F., Guillemet, R., Blokhina, E., Marty, F., Bourouina, T., Electrostatic Vibration Energy Harvester with Combined Effect of Electrical Nonlinearities and Mechanical Impact, Journal of Micromechanics and Microengineering, 24 (3), 2014, 035001.
[32] Yuksek, N. S., Zhu, J., Feng, Z. C., Almasri, M., MEMS Capacitors with Dual Cavity for Power Harvesting, SPIE Defense, Security, and Sensing, Baltimore, USA, 83770P, 2012.
[33] Lin, J., Zhu, J., Feng, Z., Almasri, M., Two-Cavity MEMS Capacitive Power Scavenger, SPIE Defense, Security, and Sensing, Baltimore, USA, 83770O, 2012.
[34] Baginsky, I. L., Kostsov, E. G., Sokolov, A. A., New Approach to the Development of Impact-Type Electrostatic Microgenerators, Optoelectronics, Instrumentation and Data Processing, 51 (3), 2015, 310–320.
[35] Li, S., Peng, Z., Zhang, A., Wang, F., Dual resonant structure for energy harvesting from random vibration sources at low frequency, AIP Advances, 6 (1), 2016, 015019.
[36] Li, S., Crovetto, A., Peng, Z., Zhang, A., Hansen, O., Wang, M., Li, X., Wang, F., Bi-resonant structure with piezoelectric PVDF films for energy harvesting from random vibration sources at low frequency, Sensors and Actuators A: Physical, 247, 2016, 547–554.
[37] Chen, G., Tang, L., Yang, Z., Tao, K., Yu, Z., An Electret‐based Thermoacoustic‐electrostatic Power Generator, International Journal of Energy Research, 44 (3), 2020, 2298–2305.
[38] Zhang, Y., Guo, X., Liu, Z., Luo, A., Wang, F., Two Mechanical Tuning Schemes to Improve the Bandwidth of Electret-Based Electrostatic Energy Harvester, 2018 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM), Auckland, New Zealand, 375–380, 2018.
[39] Zhang, Y., Wang, T., Luo, A., Hu, Y., Li, X., Wang, F., Micro Electrostatic Energy Harvester with Both Broad Bandwidth and High Normalized Power Density, Applied Energy, 212, 2018, 362–371.
[40] Varpula, A., Laakso, S. J., Havia, T., Kyynäräinen, J., Prunnila, M., Harvesting Vibrational Energy Using Material Work Functions, Scientific Reports, 4 (1), 2015, 6799.
[41] Ostertak, D. I., Sinitskiy, R. E., Dragunov, V. P., Operation Features of Electrostatic Vibrational Energy Harvester Based on Contact Potential Difference, Journal of Physics: Conference Series, 1353, 2019, 012097.
[42] Kuehne, I., Frey, A., Marinkovic, D., Eckstein, G., Seidel, H., Power MEMS—A Capacitive Vibration-to-Electrical Energy Converter with Built-in Voltage, Sensors and Actuators A: Physical, 142 (1), 2008, 263–269.