Journal of Applied and Computational Mechanics
Pull-in Phenomenon in the Electrostatically Micro-switch Suspended between Two Conductive Plates using the Artificial Neural Network
Document Type : Research Paper
Authors
1 Electrical Engineering Department, Faculty of Industrial Technologies, Urmia University of Technology (UUT), Urmia, Postal Code: 57166-17165 Iran
2 Department of Engineering, German University of Technology in Oman, Athaibah, Muscat, Postal Code: 1816, Oman
3 Mechanical and Industrial Engineering Department, Sultan Qaboos University, Al Khoudh, Muscat, Postal Code:123, Oman
Abstract
Artificial Neural Networks (ANN) are designed to evaluate the pull-in voltage of MEMS switches. The mathematical model of a micro-switch subjected to electrostatic force is preliminarily illustrated to get the relevant equations providing static deflection and pull-in voltage. Adopting the Step-by-Step Linearization Method together with a Galerkin-based reduced order model, numerical results in terms of pull-in voltage are obtained to be employed in the training process of ANN. Then, feed forward back propagation ANNs are designed and a learning process based on the Levenberg-Marquardt method is performed. The ability of designed neural networks to determine pull-in voltage have been compared with previous results presented in experimental and theoretical studies and it has been shown that the presented method has a good ability to approximate the threshold voltage of micro switch. Furthermore, the geometric and physical effect of the micro-switch on the pull-in voltage was also examined using these designed networks and relevant findings were provided.
Keywords
Main Subjects
Publisher’s Note Shahid Chamran University of Ahvaz remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
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